JPH0257551U - - Google Patents

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Publication number
JPH0257551U
JPH0257551U JP13729188U JP13729188U JPH0257551U JP H0257551 U JPH0257551 U JP H0257551U JP 13729188 U JP13729188 U JP 13729188U JP 13729188 U JP13729188 U JP 13729188U JP H0257551 U JPH0257551 U JP H0257551U
Authority
JP
Japan
Prior art keywords
ion
basic operating
recipe
beam current
beam energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13729188U
Other languages
English (en)
Japanese (ja)
Other versions
JP2530398Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988137291U priority Critical patent/JP2530398Y2/ja
Publication of JPH0257551U publication Critical patent/JPH0257551U/ja
Application granted granted Critical
Publication of JP2530398Y2 publication Critical patent/JP2530398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)
JP1988137291U 1988-10-20 1988-10-20 イオン注入装置の制御装置 Expired - Lifetime JP2530398Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988137291U JP2530398Y2 (ja) 1988-10-20 1988-10-20 イオン注入装置の制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988137291U JP2530398Y2 (ja) 1988-10-20 1988-10-20 イオン注入装置の制御装置

Publications (2)

Publication Number Publication Date
JPH0257551U true JPH0257551U (en]) 1990-04-25
JP2530398Y2 JP2530398Y2 (ja) 1997-03-26

Family

ID=31398582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988137291U Expired - Lifetime JP2530398Y2 (ja) 1988-10-20 1988-10-20 イオン注入装置の制御装置

Country Status (1)

Country Link
JP (1) JP2530398Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003178708A (ja) * 2001-12-10 2003-06-27 Nissin Electric Co Ltd イオン注入装置
JP2007048588A (ja) * 2005-08-10 2007-02-22 Jeol Ltd ガス流量設定方法およびイオンビーム加工装置
CN102237244A (zh) * 2010-04-28 2011-11-09 日新离子机器株式会社 设定束电流密度分布的调整目标的方法和离子注入装置
JP2018147653A (ja) * 2017-03-03 2018-09-20 日本電子株式会社 荷電粒子線装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617194A (en) * 1979-07-17 1981-02-18 Daihen Corp Method and apparatus for charged particle beam working
JPS62117248A (ja) * 1985-11-18 1987-05-28 Tokyo Electron Ltd イオン注入システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617194A (en) * 1979-07-17 1981-02-18 Daihen Corp Method and apparatus for charged particle beam working
JPS62117248A (ja) * 1985-11-18 1987-05-28 Tokyo Electron Ltd イオン注入システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003178708A (ja) * 2001-12-10 2003-06-27 Nissin Electric Co Ltd イオン注入装置
JP2007048588A (ja) * 2005-08-10 2007-02-22 Jeol Ltd ガス流量設定方法およびイオンビーム加工装置
CN102237244A (zh) * 2010-04-28 2011-11-09 日新离子机器株式会社 设定束电流密度分布的调整目标的方法和离子注入装置
JP2018147653A (ja) * 2017-03-03 2018-09-20 日本電子株式会社 荷電粒子線装置

Also Published As

Publication number Publication date
JP2530398Y2 (ja) 1997-03-26

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